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Recently Refurbished
New Software， Control Hardware，
Dry Process Pump， Dry Loadlock
Pump and Heater Assembly.
技術(shù)參數(shù)：
Wafer capacity: Three two inch wafers.
Load lock: Loadlock chamber with hepa filter loading area.
Heater: Single zone graphite heater
Temperature control: Temperature monitor single point T/C， Eurotherm controller， single point
Sekidenko Pyrometer.
Group III MO sources: TMGa - 2 units; TMIn - 2 units; TMAl -2 units
Group V hydride sources: AsH3 -2 lines; PH3 -2 line.
Dopants MO: CP2Mg -1 unit， DeZn - 1 unit
Dopants Hydride: H2/SiH4 - 2 lines
Neslab bath: 6 units.
Piezocon: Single channel concentration monitor for TMIn expandable to Four channels (option).
Pump: EBARA A30;
Exhaust system: particle filter/ housing; Phosphorus trap; P-trap automatic regeneration system
(option).
Gas Monitoring: CM4 4 point toxic gasmonitor.(integration option)
Software: Windows based control software.
暫無(wú)數(shù)據(jù)！
翻新MOCVD的工作原理介紹？翻新MOCVD的使用方法？翻新MOCVD多少錢(qián)一臺(tái)？翻新MOCVD使用的注意事項(xiàng)翻新MOCVD的說(shuō)明書(shū)有嗎？翻新MOCVD的操作規(guī)程有嗎？翻新MOCVD的報(bào)價(jià)含票含運(yùn)費(fèi)嗎？翻新MOCVD有現(xiàn)貨嗎？翻新MOCVD包安裝嗎？
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